Technical Details

• FE-SEM combines the 3D imaging and analytical performance of the GEMINI column with the ability of FIB for material processing and sample preparation on a nanoscopic scale
• Can be operated in High vacuum or Variable Pressure mode
• Multiple detectors available: InLens Duo (SE and BSE mode), SE2, VPSE, BSE, and STEM
• Capella FIB column with Ga-Liquid metal ion source:

Resolution at 30kV: 3nm
Voltage range: 500V-30kV
Probe current range: 1pA-100nA

• Equipped with Gas Injection System of Platinum precursor
• Equipped with Micromanipulator, capable of TEM lamellas specimen preparation
• Equipped with Oxford EDAX and EBSD detectors
• Equipped with Atlas 5, a powerful integrated software, capble of 3D Tomography imaging and Nanopatterning process
• Equipped with Leica Cryo system